甲基丙烯酸六氟异丙酯是一种有用的单体，可以掺入光刻胶聚合物中。2,2,2-Trifluoro-1-(trifluoromethyl)ethyl methacrylate (HFIPMA)
AKA: 1,1,1,3,3,3-Hexafluoroisopropyl methacrylate
CAS # 3063-94-3
Hexafluoroisopropyl methacrylate is a useful monomer that can be incorporated into photoresist polymers.
Properties
Molecular Weight 236
Boiling Point 106-107°C
Density 1.29 g/cm3
Appearance Clear, colorless liquid